000018867 001__ 18867
000018867 005__ 20180208223627.0
000018867 037__ $$aPreJuSER-18867
000018867 1001_ $$0P:(DE-Juel1)VDB5547$$aMoers, J.$$b0$$uFZJ
000018867 1112_ $$cBerlin$$d2011-09-19
000018867 245__ $$aOptimised marker definition for high overlay accuracy e-beam lithography
000018867 260__ $$c2011
000018867 29510 $$a37th international Conference on Micro- and Nanoengineering MNE 2011
000018867 3367_ $$0PUB:(DE-HGF)24$$2PUB:(DE-HGF)$$aPoster
000018867 3367_ $$033$$2EndNote$$aConference Paper
000018867 3367_ $$2DataCite$$aOutput Types/Conference Poster
000018867 3367_ $$2DRIVER$$aconferenceObject
000018867 3367_ $$2ORCID$$aCONFERENCE_POSTER
000018867 3367_ $$2BibTeX$$aINPROCEEDINGS
000018867 500__ $$aRecord converted from VDB: 12.11.2012
000018867 536__ $$0G:(DE-Juel1)FUEK412$$2G:(DE-HGF)$$aGrundlagen für zukünftige Informationstechnologien$$cP42$$x0
000018867 7001_ $$0P:(DE-Juel1)128856$$aTrellenkamp, St.$$b1$$uFZJ
000018867 7001_ $$0P:(DE-HGF)0$$aRienks, B.$$b2
000018867 909CO $$ooai:juser.fz-juelich.de:18867$$pVDB
000018867 9131_ $$0G:(DE-Juel1)FUEK412$$bSchlüsseltechnologien$$kP42$$lGrundlagen für zukünftige Informationstechnologien (FIT)$$vGrundlagen für zukünftige Informationstechnologien$$x0
000018867 9141_ $$y2011
000018867 9201_ $$0I:(DE-82)080009_20140620$$gJARA$$kJARA-FIT$$lJülich-Aachen Research Alliance - Fundamentals of Future Information Technology$$x1
000018867 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$gPGI$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0
000018867 9201_ $$0I:(DE-Juel1)PGI-8-20110106$$gPGI$$kPGI-8$$lBioelektronik$$x2
000018867 970__ $$aVDB:(DE-Juel1)133572
000018867 980__ $$aVDB
000018867 980__ $$aConvertedRecord
000018867 980__ $$aposter
000018867 980__ $$aI:(DE-82)080009_20140620
000018867 980__ $$aI:(DE-Juel1)PGI-9-20110106
000018867 980__ $$aI:(DE-Juel1)PGI-8-20110106
000018867 980__ $$aUNRESTRICTED
000018867 981__ $$aI:(DE-Juel1)PGI-9-20110106
000018867 981__ $$aI:(DE-Juel1)PGI-8-20110106
000018867 981__ $$aI:(DE-Juel1)VDB881