TY  - CONF
AU  - Moers, J.
AU  - Trellenkamp, St.
AU  - Rienks, B.
TI  - Optimised marker definition for high overlay accuracy e-beam lithography
M1  - PreJuSER-18867
PY  - 2011
N1  - Record converted from VDB: 12.11.2012
Y2  - 19 Sep 2011
M2  - Berlin, 
LB  - PUB:(DE-HGF)24
UR  - https://juser.fz-juelich.de/record/18867
ER  -