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@ARTICLE{Schuck:189504,
      author       = {Schuck, Martin and Rieß, Sally and Schreiber, Marcel and
                      Mussler, Gregor and Grützmacher, Detlev and Hardtdegen,
                      Hilde},
      title        = {{M}etal organic vapor phase epitaxy of hexagonal
                      {G}e–{S}b–{T}e ({GST})},
      journal      = {Journal of crystal growth},
      volume       = {420},
      issn         = {0022-0248},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier},
      reportid     = {FZJ-2015-02661},
      pages        = {37 - 41},
      year         = {2015},
      abstract     = {Epitaxial, hexagonal Ge–Sb–Te was grown on
                      Si(111)Si(111) substrates by Metal Organic Vapor Phase
                      Epitaxy (MOVPE) using the precursor digermane. The effect of
                      reactor pressure, growth temperature and in situ
                      pre-treatment on morphology and Ge–Sb–Te composition was
                      studied. The composition is sensitive to reactor pressure
                      and growth temperature. Compositional control is achieved at
                      a reactor pressure of View the MathML source50hPa. Substrate
                      pre-treatment affects film coalescence. The use of hydrogen
                      and a suitable precursor pre-treatment leads to enhanced
                      surface coverage. X-ray diffraction reveals a trigonal
                      structure with lattice parameters close to that reported for
                      Ge1Sb2Te4Ge1Sb2Te4 crystallizing in the View the MathML
                      sourceR3¯m phase. The composition was confirmed by
                      energy-dispersive X-ray spectroscopy.},
      cin          = {PGI-9},
      ddc          = {540},
      cid          = {I:(DE-Juel1)PGI-9-20110106},
      pnm          = {523 - Controlling Configuration-Based Phenomena (POF3-523)},
      pid          = {G:(DE-HGF)POF3-523},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000353825100007},
      doi          = {10.1016/j.jcrysgro.2015.03.034},
      url          = {https://juser.fz-juelich.de/record/189504},
}