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| 001 | 189504 | ||
| 005 | 20210129215402.0 | ||
| 024 | 7 | _ | |a 10.1016/j.jcrysgro.2015.03.034 |2 doi |
| 024 | 7 | _ | |a 0022-0248 |2 ISSN |
| 024 | 7 | _ | |a 1873-5002 |2 ISSN |
| 024 | 7 | _ | |a WOS:000353825100007 |2 WOS |
| 037 | _ | _ | |a FZJ-2015-02661 |
| 082 | _ | _ | |a 540 |
| 100 | 1 | _ | |a Schuck, Martin |0 P:(DE-Juel1)145470 |b 0 |e Corresponding Author |u fzj |
| 245 | _ | _ | |a Metal organic vapor phase epitaxy of hexagonal Ge–Sb–Te (GST) |
| 260 | _ | _ | |a Amsterdam [u.a.] |c 2015 |b Elsevier |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1429536722_28971 |2 PUB:(DE-HGF) |
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| 336 | 7 | _ | |a article |2 DRIVER |
| 520 | _ | _ | |a Epitaxial, hexagonal Ge–Sb–Te was grown on Si(111)Si(111) substrates by Metal Organic Vapor Phase Epitaxy (MOVPE) using the precursor digermane. The effect of reactor pressure, growth temperature and in situ pre-treatment on morphology and Ge–Sb–Te composition was studied. The composition is sensitive to reactor pressure and growth temperature. Compositional control is achieved at a reactor pressure of View the MathML source50hPa. Substrate pre-treatment affects film coalescence. The use of hydrogen and a suitable precursor pre-treatment leads to enhanced surface coverage. X-ray diffraction reveals a trigonal structure with lattice parameters close to that reported for Ge1Sb2Te4Ge1Sb2Te4 crystallizing in the View the MathML sourceR3¯m phase. The composition was confirmed by energy-dispersive X-ray spectroscopy. |
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| 700 | 1 | _ | |a Rieß, Sally |0 P:(DE-Juel1)145686 |b 1 |
| 700 | 1 | _ | |a Schreiber, Marcel |0 P:(DE-HGF)0 |b 2 |
| 700 | 1 | _ | |a Mussler, Gregor |0 P:(DE-Juel1)128617 |b 3 |
| 700 | 1 | _ | |a Grützmacher, Detlev |0 P:(DE-Juel1)125588 |b 4 |
| 700 | 1 | _ | |a Hardtdegen, Hilde |0 P:(DE-Juel1)125593 |b 5 |u fzj |
| 773 | _ | _ | |a 10.1016/j.jcrysgro.2015.03.034 |g Vol. 420, p. 37 - 41 |0 PERI:(DE-600)1466514-1 |p 37 - 41 |t Journal of crystal growth |v 420 |y 2015 |x 0022-0248 |
| 856 | 4 | _ | |u http://www.sciencedirect.com/science/article/pii/S0022024815002572 |
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