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@ARTICLE{Mller:189764,
      author       = {Müller, M. R. and Gumprich, A. and Schütte, F. and
                      Kallis, K. and Künzelmann, U. and Engels, S. and Stampfer,
                      C. and Wilck, N. and Knoch, J.},
      title        = {{B}uried triple-gate structures for advanced field-effect
                      transistor devices},
      journal      = {Microelectronic engineering},
      volume       = {119},
      issn         = {0167-9317},
      address      = {[S.l.] @},
      publisher    = {Elsevier},
      reportid     = {FZJ-2015-02794},
      pages        = {95 - 99},
      year         = {2014},
      abstract     = {One key element in the investigation of novel channel
                      materials and device principles is the realization of an
                      appropriate source–drain doping profile. The paper at hand
                      describes the manufacturing of a buried triple-gate (BTG)
                      structure, where three separately addressable gates are
                      implemented to control the charge carrier density within
                      source, drain, and the channel of a field-effect transistor.
                      The BTG structure is optimized for the investigation of
                      graphene, and a 30 nm graphene nanoribbon is fabricated on
                      top of the structure. Electrical measurements at 25 K
                      indicate the successful realization of p-n junctions and
                      demonstrate band-to-band tunneling at the source–channel
                      and channel–drain interfaces.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {620},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {421 - Frontiers of charge based Electronics (POF2-421)},
      pid          = {G:(DE-HGF)POF2-421},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000343364400021},
      doi          = {10.1016/j.mee.2014.02.001},
      url          = {https://juser.fz-juelich.de/record/189764},
}