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000019937 084__ $$2WoS$$aNanoscience & Nanotechnology
000019937 084__ $$2WoS$$aMaterials Science, Multidisciplinary
000019937 084__ $$2WoS$$aPhysics, Applied
000019937 1001_ $$0P:(DE-HGF)0$$aSchirmer, M.$$b0
000019937 245__ $$aFabrication of layered nanostructures by successive electron beam induced deposition with two precursors: protective capping of metallic iron structures
000019937 260__ $$aBristol$$bIOP Publ.$$c2011
000019937 300__ $$a475304
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000019937 440_0 $$04475$$aNanotechnology$$v22$$x0957-4484$$y47
000019937 500__ $$3POF3_Assignment on 2016-02-29
000019937 500__ $$aThis work has been supported by the 'Deutsche Forschungsgemeinschaft' through Grant MA 4246/1-2, COST actions CM0601 and D41 and by the Cluster of Excellence 'Engineering of Advanced Materials' (EAM). AXG and CSF also gratefully acknowledge salary support from the US Department of Energy under Contract No. DE-AC02-05CH11231. CP and BB acknowledge financial support from the Humboldt Foundation. We thank Stefan Tampier (Inorganic Chemistry, University Erlangen-Nuremberg) for technical assistance.
000019937 520__ $$aWe report on the stepwise generation of layered nanostructures via electron beam induced deposition (EBID) using organometallic precursor molecules in ultra-high vacuum (UHV). In a first step a metallic iron line structure was produced using iron pentacarbonyl; in a second step this nanostructure was then locally capped with a 2-3 nm thin titanium oxide-containing film fabricated from titanium tetraisopropoxide. The chemical composition of the deposited layers was analyzed by spatially resolved Auger electron spectroscopy. With spatially resolved x-ray absorption spectroscopy at the Fe L₃ edge, it was demonstrated that the thin capping layer prevents the iron structure from oxidation upon exposure to air.
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000019937 7001_ $$0P:(DE-HGF)0$$aWalz, M.M.$$b1
000019937 7001_ $$0P:(DE-HGF)0$$aPapp, C.$$b2
000019937 7001_ $$0P:(DE-HGF)0$$aKronast, F$$b3
000019937 7001_ $$0P:(DE-HGF)0$$aGray, A.X.$$b4
000019937 7001_ $$0P:(DE-HGF)0$$aBalke, B.$$b5
000019937 7001_ $$0P:(DE-Juel1)130601$$aCramm, S.$$b6$$uFZJ
000019937 7001_ $$0P:(DE-Juel1)VDB73838$$aFadley, C.S.$$b7$$uFZJ
000019937 7001_ $$0P:(DE-HGF)0$$aSteinruck, H.P.$$b8
000019937 7001_ $$0P:(DE-HGF)0$$aMarbach, H.$$b9
000019937 773__ $$0PERI:(DE-600)1362365-5$$a10.1088/0957-4484/22/47/475304$$gVol. 22, p. 475304$$p475304$$q22<475304$$tNanotechnology$$v22$$x0957-4484$$y2011
000019937 8567_ $$uhttp://dx.doi.org/10.1088/0957-4484/22/47/475304
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