TY  - JOUR
AU  - Schirmer, M.
AU  - Walz, M.M.
AU  - Papp, C.
AU  - Kronast, F
AU  - Gray, A.X.
AU  - Balke, B.
AU  - Cramm, S.
AU  - Fadley, C.S.
AU  - Steinruck, H.P.
AU  - Marbach, H.
TI  - Fabrication of layered nanostructures by successive electron beam induced deposition with two precursors: protective capping of metallic iron structures
JO  - Nanotechnology
VL  - 22
SN  - 0957-4484
CY  - Bristol
PB  - IOP Publ.
M1  - PreJuSER-19937
SP  - 475304
PY  - 2011
N1  - This work has been supported by the 'Deutsche Forschungsgemeinschaft' through Grant MA 4246/1-2, COST actions CM0601 and D41 and by the Cluster of Excellence 'Engineering of Advanced Materials' (EAM). AXG and CSF also gratefully acknowledge salary support from the US Department of Energy under Contract No. DE-AC02-05CH11231. CP and BB acknowledge financial support from the Humboldt Foundation. We thank Stefan Tampier (Inorganic Chemistry, University Erlangen-Nuremberg) for technical assistance.
AB  - We report on the stepwise generation of layered nanostructures via electron beam induced deposition (EBID) using organometallic precursor molecules in ultra-high vacuum (UHV). In a first step a metallic iron line structure was produced using iron pentacarbonyl; in a second step this nanostructure was then locally capped with a 2-3 nm thin titanium oxide-containing film fabricated from titanium tetraisopropoxide. The chemical composition of the deposited layers was analyzed by spatially resolved Auger electron spectroscopy. With spatially resolved x-ray absorption spectroscopy at the Fe L₃ edge, it was demonstrated that the thin capping layer prevents the iron structure from oxidation upon exposure to air.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
C6  - pmid:22057093
UR  - <Go to ISI:>//WOS:000296759000005
DO  - DOI:10.1088/0957-4484/22/47/475304
UR  - https://juser.fz-juelich.de/record/19937
ER  -