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@ARTICLE{Schirmer:19937,
      author       = {Schirmer, M. and Walz, M.M. and Papp, C. and Kronast, F and
                      Gray, A.X. and Balke, B. and Cramm, S. and Fadley, C.S. and
                      Steinruck, H.P. and Marbach, H.},
      title        = {{F}abrication of layered nanostructures by successive
                      electron beam induced deposition with two precursors:
                      protective capping of metallic iron structures},
      journal      = {Nanotechnology},
      volume       = {22},
      issn         = {0957-4484},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {PreJuSER-19937},
      pages        = {475304},
      year         = {2011},
      note         = {This work has been supported by the 'Deutsche
                      Forschungsgemeinschaft' through Grant MA 4246/1-2, COST
                      actions CM0601 and D41 and by the Cluster of Excellence
                      'Engineering of Advanced Materials' (EAM). AXG and CSF also
                      gratefully acknowledge salary support from the US Department
                      of Energy under Contract No. DE-AC02-05CH11231. CP and BB
                      acknowledge financial support from the Humboldt Foundation.
                      We thank Stefan Tampier (Inorganic Chemistry, University
                      Erlangen-Nuremberg) for technical assistance.},
      abstract     = {We report on the stepwise generation of layered
                      nanostructures via electron beam induced deposition (EBID)
                      using organometallic precursor molecules in ultra-high
                      vacuum (UHV). In a first step a metallic iron line structure
                      was produced using iron pentacarbonyl; in a second step this
                      nanostructure was then locally capped with a 2-3 nm thin
                      titanium oxide-containing film fabricated from titanium
                      tetraisopropoxide. The chemical composition of the deposited
                      layers was analyzed by spatially resolved Auger electron
                      spectroscopy. With spatially resolved x-ray absorption
                      spectroscopy at the Fe L₃ edge, it was demonstrated that
                      the thin capping layer prevents the iron structure from
                      oxidation upon exposure to air.},
      keywords     = {J (WoSType)},
      cin          = {PGI-6},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-6-20110106},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      shelfmark    = {Nanoscience $\&$ Nanotechnology / Materials Science,
                      Multidisciplinary / Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:22057093},
      UT           = {WOS:000296759000005},
      doi          = {10.1088/0957-4484/22/47/475304},
      url          = {https://juser.fz-juelich.de/record/19937},
}