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@ARTICLE{Bangert:201546,
      author       = {Bangert, U. and Pierce, W. and Kepaptsoglou, D. M. and
                      Ramasse, Q. and Zan, R. and Gass, M. H. and Van den Berg, J.
                      A. and Boothroyd, C. B. and Amani, J. and Hofsäss, H.},
      title        = {{I}on {I}mplantation of {G}raphene—{T}oward {IC}
                      {C}ompatible {T}echnologies},
      journal      = {Nano letters},
      volume       = {13},
      number       = {10},
      issn         = {1530-6992},
      address      = {Washington, DC},
      publisher    = {ACS Publ.},
      reportid     = {FZJ-2015-03840},
      pages        = {4902 - 4907},
      year         = {2013},
      abstract     = {Doping of graphene via low energy ion implantation could
                      open possibilities for fabrication of nanometer-scale
                      patterned graphene-based devices as well as for graphene
                      functionalization compatible with large-scale integrated
                      semiconductor technology. Using advanced electron
                      microscopy/spectroscopy methods, we show for the first time
                      directly that graphene can be doped with B and N via ion
                      implantation and that the retention is in good agreement
                      with predictions from calculation-based literature values.
                      Atomic resolution high-angle dark field imaging (HAADF)
                      combined with single-atom electron energy loss (EEL)
                      spectroscopy reveals that for sufficiently low implantation
                      energies ions are predominantly substitutionally
                      incorporated into the graphene lattice with a very small
                      fraction residing in defect-related sites.},
      cin          = {PGI-5},
      ddc          = {540},
      cid          = {I:(DE-Juel1)PGI-5-20110106},
      pnm          = {424 - Exploratory materials and phenomena (POF2-424)},
      pid          = {G:(DE-HGF)POF2-424},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000326356300050},
      pubmed       = {pmid:24059439},
      doi          = {10.1021/nl402812y},
      url          = {https://juser.fz-juelich.de/record/201546},
}