TY  - JOUR
AU  - Dehoff, Carsten
AU  - Hennings, Alexander
AU  - Kügeler, Carsten
AU  - Schneller, Theodor
AU  - Böttger, Ulrich
TI  - Piezoelectric actuated MEMS for use in microwave switching and filtering applications
JO  - Physica status solidi / A
VL  - 208
IS  - 2
SN  - 1862-6300
CY  - Weinheim
PB  - Wiley-VCH
M1  - FZJ-2015-04195
SP  - 343 - 356
PY  - 2011
AB  - The paper reviews the developments made for designing and fabricating a piezoelectric driven actuator and its integration into coplanar wave guide (CPW) microwave structures. In the first part of this work the electromechanical properties of different lead–zirconate–titanate (PZT) thin films are investigated. A modified precursor route for chemical solution deposition (CSD) is introduced to minimize the thermal budget of the PZT by maintaining its superior piezoelectric properties. The second part deals with the fabrication of a piezoelectric driven actuator for use in RF switching applications. Advantages of bulk and surface micromachined devices are compared and a suitable actuator design is proposed. Based on these results, a piezoelectrically actuated shunt switch for use in CPW devices is developed and optimized, and the concept is confirmed by measurements. Finally, novel reconfigurable CPW band-pass filters are presented, which demonstrate the usefulness of the developed shunt switches in microwave applications.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000288087100010
DO  - DOI:10.1002/pssa.201100004
UR  - https://juser.fz-juelich.de/record/201905
ER  -