Journal Article

FZJ-2015-04195

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Piezoelectric actuated MEMS for use in microwave switching and filtering applications

Dehoff, C. (Corresponding Author) ; Hennings, A. ; Kügeler, C.FZJ* ; Schneller, T. ; Böttger, U.

2011
Wiley-VCH Weinheim

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Please use a persistent id in citations: doi:10.1002/pssa.201100004

Abstract: The paper reviews the developments made for designing and fabricating a piezoelectric driven actuator and its integration into coplanar wave guide (CPW) microwave structures. In the first part of this work the electromechanical properties of different lead–zirconate–titanate (PZT) thin films are investigated. A modified precursor route for chemical solution deposition (CSD) is introduced to minimize the thermal budget of the PZT by maintaining its superior piezoelectric properties. The second part deals with the fabrication of a piezoelectric driven actuator for use in RF switching applications. Advantages of bulk and surface micromachined devices are compared and a suitable actuator design is proposed. Based on these results, a piezoelectrically actuated shunt switch for use in CPW devices is developed and optimized, and the concept is confirmed by measurements. Finally, novel reconfigurable CPW band-pass filters are presented, which demonstrate the usefulness of the developed shunt switches in microwave applications.

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Contributing Institute(s):

1. Elektronische Materialien (PGI-7)

Research Program(s):

1. 421 - Frontiers of charge based Electronics (POF2-421) (POF2-421)

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Database coverage:
; Current Contents - Physical, Chemical and Earth Sciences ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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