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@ARTICLE{Dehoff:201905,
      author       = {Dehoff, Carsten and Hennings, Alexander and Kügeler,
                      Carsten and Schneller, Theodor and Böttger, Ulrich},
      title        = {{P}iezoelectric actuated {MEMS} for use in microwave
                      switching and filtering applications},
      journal      = {Physica status solidi / A},
      volume       = {208},
      number       = {2},
      issn         = {1862-6300},
      address      = {Weinheim},
      publisher    = {Wiley-VCH},
      reportid     = {FZJ-2015-04195},
      pages        = {343 - 356},
      year         = {2011},
      abstract     = {The paper reviews the developments made for designing and
                      fabricating a piezoelectric driven actuator and its
                      integration into coplanar wave guide (CPW) microwave
                      structures. In the first part of this work the
                      electromechanical properties of different
                      lead–zirconate–titanate (PZT) thin films are
                      investigated. A modified precursor route for chemical
                      solution deposition (CSD) is introduced to minimize the
                      thermal budget of the PZT by maintaining its superior
                      piezoelectric properties. The second part deals with the
                      fabrication of a piezoelectric driven actuator for use in RF
                      switching applications. Advantages of bulk and surface
                      micromachined devices are compared and a suitable actuator
                      design is proposed. Based on these results, a
                      piezoelectrically actuated shunt switch for use in CPW
                      devices is developed and optimized, and the concept is
                      confirmed by measurements. Finally, novel reconfigurable CPW
                      band-pass filters are presented, which demonstrate the
                      usefulness of the developed shunt switches in microwave
                      applications.},
      cin          = {PGI-7},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-7-20110106},
      pnm          = {421 - Frontiers of charge based Electronics (POF2-421)},
      pid          = {G:(DE-HGF)POF2-421},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000288087100010},
      doi          = {10.1002/pssa.201100004},
      url          = {https://juser.fz-juelich.de/record/201905},
}