%0 Journal Article
%A Rudolf, Denis
%A Bußmann, Jan
%A Odstrčil, Michal
%A Dong, Minjie
%A Bergmann, Klaus
%A Danylyuk, Serhiy
%A Juschkin, Larissa
%T Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source
%J Optics letters
%V 40
%N 12
%@ 1539-4794
%C Washington, DC
%I Soc.
%M FZJ-2015-05007
%P 2818 - 2821
%D 2015
%X Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications.
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000356234300037
%R 10.1364/OL.40.002818
%U https://juser.fz-juelich.de/record/202855