Journal Article

FZJ-2015-05007

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source

Rudolf, D. (Corresponding author)FZJ* ; Bußmann, J.FZJ* ; Odstrčil, M.FZJ* ; Dong, M.FZJ* ; Bergmann, K. ; Danylyuk, S. ; Juschkin, L.FZJ*

2015
Soc. Washington, DC

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Please use a persistent id in citations: doi:10.1364/OL.40.002818

Abstract: Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications.

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Contributing Institute(s):

1. Halbleiter-Nanoelektronik (PGI-9)
2. JARA-FIT (JARA-FIT)

Research Program(s):

1. 521 - Controlling Electron Charge-Based Phenomena (POF3-521) (POF3-521)

Appears in the scientific report 2015

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Database coverage:
; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; IF < 5 ; JCR ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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