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000202855 1001_ $$0P:(DE-Juel1)145301$$aRudolf, Denis$$b0$$eCorresponding author$$ufzj
000202855 245__ $$aInterferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source
000202855 260__ $$aWashington, DC$$bSoc.$$c2015
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000202855 520__ $$aExtreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications.
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000202855 7001_ $$0P:(DE-Juel1)162370$$aBußmann, Jan$$b1$$ufzj
000202855 7001_ $$0P:(DE-Juel1)165774$$aOdstrčil, Michal$$b2$$ufzj
000202855 7001_ $$0P:(DE-HGF)0$$aDong, Minjie$$b3
000202855 7001_ $$0P:(DE-HGF)0$$aBergmann, Klaus$$b4
000202855 7001_ $$0P:(DE-HGF)0$$aDanylyuk, Serhiy$$b5
000202855 7001_ $$0P:(DE-Juel1)157957$$aJuschkin, Larissa$$b6$$ufzj
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