TY  - JOUR
AU  - Rudolf, Denis
AU  - Bußmann, Jan
AU  - Odstrčil, Michal
AU  - Dong, Minjie
AU  - Bergmann, Klaus
AU  - Danylyuk, Serhiy
AU  - Juschkin, Larissa
TI  - Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source
JO  - Optics letters
VL  - 40
IS  - 12
SN  - 1539-4794
CY  - Washington, DC
PB  - Soc.
M1  - FZJ-2015-05007
SP  - 2818 - 2821
PY  - 2015
AB  - Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000356234300037
DO  - DOI:10.1364/OL.40.002818
UR  - https://juser.fz-juelich.de/record/202855
ER  -