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@ARTICLE{Rudolf:202855,
author = {Rudolf, Denis and Bußmann, Jan and Odstrčil, Michal and
Dong, Minjie and Bergmann, Klaus and Danylyuk, Serhiy and
Juschkin, Larissa},
title = {{I}nterferometric broadband {F}ourier spectroscopy with a
partially coherent gas-discharge extreme ultraviolet light
source},
journal = {Optics letters},
volume = {40},
number = {12},
issn = {1539-4794},
address = {Washington, DC},
publisher = {Soc.},
reportid = {FZJ-2015-05007},
pages = {2818 - 2821},
year = {2015},
abstract = {Extreme ultraviolet (EUV) spectroscopy is a powerful tool
for studying fundamental processes in plasmas as well as for
spectral characterization of EUV light sources and EUV
optics. However, a simultaneous measurement covering a
broadband spectral range is difficult to realize. Here, we
propose a method for interferometric broadband Fourier
spectroscopy connecting soft x ray and visible spectral
ranges with moderate spectral resolution. We present an
analytical model to recover the spectrum from a double-slit
interferogram. We apply our model for spectral
characterization of a partially coherent gas-discharge EUV
light source operated with different gases in the spectral
range between 10 and 110 nm wavelengths. Our approach allows
a simple and fast broadband spectroscopy with fully or
partially spatially coherent light sources, for instance, to
characterize out-of-band radiation in EUV lithography
applications.},
cin = {PGI-9 / JARA-FIT},
ddc = {530},
cid = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
pnm = {521 - Controlling Electron Charge-Based Phenomena
(POF3-521)},
pid = {G:(DE-HGF)POF3-521},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000356234300037},
doi = {10.1364/OL.40.002818},
url = {https://juser.fz-juelich.de/record/202855},
}