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@ARTICLE{Rudolf:202855,
      author       = {Rudolf, Denis and Bußmann, Jan and Odstrčil, Michal and
                      Dong, Minjie and Bergmann, Klaus and Danylyuk, Serhiy and
                      Juschkin, Larissa},
      title        = {{I}nterferometric broadband {F}ourier spectroscopy with a
                      partially coherent gas-discharge extreme ultraviolet light
                      source},
      journal      = {Optics letters},
      volume       = {40},
      number       = {12},
      issn         = {1539-4794},
      address      = {Washington, DC},
      publisher    = {Soc.},
      reportid     = {FZJ-2015-05007},
      pages        = {2818 - 2821},
      year         = {2015},
      abstract     = {Extreme ultraviolet (EUV) spectroscopy is a powerful tool
                      for studying fundamental processes in plasmas as well as for
                      spectral characterization of EUV light sources and EUV
                      optics. However, a simultaneous measurement covering a
                      broadband spectral range is difficult to realize. Here, we
                      propose a method for interferometric broadband Fourier
                      spectroscopy connecting soft x ray and visible spectral
                      ranges with moderate spectral resolution. We present an
                      analytical model to recover the spectrum from a double-slit
                      interferogram. We apply our model for spectral
                      characterization of a partially coherent gas-discharge EUV
                      light source operated with different gases in the spectral
                      range between 10 and 110 nm wavelengths. Our approach allows
                      a simple and fast broadband spectroscopy with fully or
                      partially spatially coherent light sources, for instance, to
                      characterize out-of-band radiation in EUV lithography
                      applications.},
      cin          = {PGI-9 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000356234300037},
      doi          = {10.1364/OL.40.002818},
      url          = {https://juser.fz-juelich.de/record/202855},
}