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| 001 | 202855 | ||
| 005 | 20210129220238.0 | ||
| 024 | 7 | _ | |a 10.1364/OL.40.002818 |2 doi |
| 024 | 7 | _ | |a 0146-9592 |2 ISSN |
| 024 | 7 | _ | |a 1539-4794 |2 ISSN |
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| 037 | _ | _ | |a FZJ-2015-05007 |
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| 100 | 1 | _ | |a Rudolf, Denis |0 P:(DE-Juel1)145301 |b 0 |e Corresponding author |u fzj |
| 245 | _ | _ | |a Interferometric broadband Fourier spectroscopy with a partially coherent gas-discharge extreme ultraviolet light source |
| 260 | _ | _ | |a Washington, DC |c 2015 |b Soc. |
| 336 | 7 | _ | |a Journal Article |b journal |m journal |0 PUB:(DE-HGF)16 |s 1437482031_27742 |2 PUB:(DE-HGF) |
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| 520 | _ | _ | |a Extreme ultraviolet (EUV) spectroscopy is a powerful tool for studying fundamental processes in plasmas as well as for spectral characterization of EUV light sources and EUV optics. However, a simultaneous measurement covering a broadband spectral range is difficult to realize. Here, we propose a method for interferometric broadband Fourier spectroscopy connecting soft x ray and visible spectral ranges with moderate spectral resolution. We present an analytical model to recover the spectrum from a double-slit interferogram. We apply our model for spectral characterization of a partially coherent gas-discharge EUV light source operated with different gases in the spectral range between 10 and 110 nm wavelengths. Our approach allows a simple and fast broadband spectroscopy with fully or partially spatially coherent light sources, for instance, to characterize out-of-band radiation in EUV lithography applications. |
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| 700 | 1 | _ | |a Bußmann, Jan |0 P:(DE-Juel1)162370 |b 1 |u fzj |
| 700 | 1 | _ | |a Odstrčil, Michal |0 P:(DE-Juel1)165774 |b 2 |u fzj |
| 700 | 1 | _ | |a Dong, Minjie |0 P:(DE-HGF)0 |b 3 |
| 700 | 1 | _ | |a Bergmann, Klaus |0 P:(DE-HGF)0 |b 4 |
| 700 | 1 | _ | |a Danylyuk, Serhiy |0 P:(DE-HGF)0 |b 5 |
| 700 | 1 | _ | |a Juschkin, Larissa |0 P:(DE-Juel1)157957 |b 6 |u fzj |
| 773 | _ | _ | |a 10.1364/OL.40.002818 |g Vol. 40, no. 12, p. 2818 - |0 PERI:(DE-600)1479014-2 |n 12 |p 2818 - 2821 |t Optics letters |v 40 |y 2015 |x 1539-4794 |
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