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@ARTICLE{Liu:203228,
      author       = {Liu, Linjie and Knoll, Lars and Wirths, Stephan and Xu,
                      Dawei and Mussler, Gregor and Breuer, Uwe and Holländer,
                      Bernhard and Di, Zengfeng and Zhang, Miao and Mantl,
                      Siegfried and Zhao, Qing-Tai},
      title        = {{H}omogeneous {N}i{S}i1−x{G}ex layer formation on
                      strained {S}i{G}e with ultrathin {N}i layers},
      journal      = {Microelectronic engineering},
      volume       = {139},
      issn         = {0167-9317},
      address      = {[S.l.] @},
      publisher    = {Elsevier},
      reportid     = {FZJ-2015-05214},
      pages        = {26 - 30},
      year         = {2015},
      abstract     = {Homogeneous nickel germanosilicide layers with low sheet
                      resistance have been achieved on highly strained SiGe
                      layers. The layer homogeneity improves with decreasing Ni
                      thickness. Ultrathin Ni layers of 3 nm thermally treated at
                      400 °C yield to homogeneous germanosilicide layers with a
                      preferential {0 1 0} growth plane and sharp interfaces to
                      the SiGe layer. This is assumed to be energetically driven
                      by lower surface and interface energies due to the increased
                      surface/volume ratio with decreasing layer thickness. The
                      strain in the remaining SiGe layers can be conserved at
                      lower temperatures. However, at higher temperatures,
                      germanosilicidation enhances the strain relaxation.},
      cin          = {PGI-9 / ZEA-3},
      ddc          = {620},
      cid          = {I:(DE-Juel1)PGI-9-20110106 / I:(DE-Juel1)ZEA-3-20090406},
      pnm          = {521 - Controlling Electron Charge-Based Phenomena
                      (POF3-521)},
      pid          = {G:(DE-HGF)POF3-521},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000357905600005},
      doi          = {10.1016/j.mee.2015.04.083},
      url          = {https://juser.fz-juelich.de/record/203228},
}