%0 Journal Article
%A Zhang, W.
%A Bunte, E.
%A Ruske, F.
%A Köhl, D.
%A Besmehn, A.
%A Worbs, J.
%A Siekmann, H.
%A Kirchhoff, J.
%A Gordijn, A
%A Hüpkes, J.
%T As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering
%J Thin solid films
%V 520
%@ 0040-6090
%C Amsterdam [u.a.]
%I Elsevier
%M PreJuSER-22597
%P 4208 - 4213
%D 2012
%Z Record converted from VDB: 12.11.2012
%X This work presents as-grown textured ZnO:Al films by rf magnetron sputtering initiated by pre-treatment of glass substrate with mixed argon and oxygen ions. A 650 nm thick of this film exhibits surface texture features with lateral size around 500 nm; the resistivity is below 5 x 10(-4) Omega . cm and the transparency in the near-infrared spectral range is high (>80% at 1000 nm). Microcrystalline silicon thin film solar cells grown on the textured glass exhibit excellent light trapping effect with a short circuit current density of 18.2 mA/cm(2). (C) 2011 Elsevier B.V. All rights reserved.
%K J (WoSType)
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000302839900023
%R 10.1016/j.tsf.2011.04.098
%U https://juser.fz-juelich.de/record/22597