Journal Article PreJuSER-22597

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As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering

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2012
Elsevier Amsterdam [u.a.]

Thin solid films 520, 4208 - 4213 () [10.1016/j.tsf.2011.04.098]

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Abstract: This work presents as-grown textured ZnO:Al films by rf magnetron sputtering initiated by pre-treatment of glass substrate with mixed argon and oxygen ions. A 650 nm thick of this film exhibits surface texture features with lateral size around 500 nm; the resistivity is below 5 x 10(-4) Omega . cm and the transparency in the near-infrared spectral range is high (>80% at 1000 nm). Microcrystalline silicon thin film solar cells grown on the textured glass exhibit excellent light trapping effect with a short circuit current density of 18.2 mA/cm(2). (C) 2011 Elsevier B.V. All rights reserved.

Keyword(s): J ; Ion beam treatment (auto) ; Magnetron sputtering (auto) ; ZnO:Al films (auto) ; TCO (auto) ; Solar cells (auto)


Note: Record converted from VDB: 12.11.2012

Contributing Institute(s):
  1. Zentralabteilung für Chemische Analysen (ZCH)
  2. Photovoltaik (IEK-5)
Research Program(s):
  1. Erneuerbare Energien (P11)

Appears in the scientific report 2012
Database coverage:
Medline ; Current Contents - Life Sciences ; Current Contents - Physical, Chemical and Earth Sciences ; JCR ; NationallizenzNationallizenz ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection
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The record appears in these collections:
Document types > Articles > Journal Article
Institute Collections > IMD > IMD-3
Institute Collections > ZEA > ZEA-3
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IEK > IEK-5
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 Record created 2012-11-13, last modified 2024-07-08



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