TY  - JOUR
AU  - Zhang, W.
AU  - Bunte, E.
AU  - Ruske, F.
AU  - Köhl, D.
AU  - Besmehn, A.
AU  - Worbs, J.
AU  - Siekmann, H.
AU  - Kirchhoff, J.
AU  - Gordijn, A
AU  - Hüpkes, J.
TI  - As-grown textured zinc oxide films by ion beam treatment and magnetron sputtering
JO  - Thin solid films
VL  - 520
SN  - 0040-6090
CY  - Amsterdam [u.a.]
PB  - Elsevier
M1  - PreJuSER-22597
SP  - 4208 - 4213
PY  - 2012
N1  - Record converted from VDB: 12.11.2012
AB  - This work presents as-grown textured ZnO:Al films by rf magnetron sputtering initiated by pre-treatment of glass substrate with mixed argon and oxygen ions. A 650 nm thick of this film exhibits surface texture features with lateral size around 500 nm; the resistivity is below 5 x 10(-4) Omega . cm and the transparency in the near-infrared spectral range is high (>80% at 1000 nm). Microcrystalline silicon thin film solar cells grown on the textured glass exhibit excellent light trapping effect with a short circuit current density of 18.2 mA/cm(2). (C) 2011 Elsevier B.V. All rights reserved.
KW  - J (WoSType)
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000302839900023
DO  - DOI:10.1016/j.tsf.2011.04.098
UR  - https://juser.fz-juelich.de/record/22597
ER  -