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@ARTICLE{Zhang:22597,
      author       = {Zhang, W. and Bunte, E. and Ruske, F. and Köhl, D. and
                      Besmehn, A. and Worbs, J. and Siekmann, H. and Kirchhoff, J.
                      and Gordijn, A and Hüpkes, J.},
      title        = {{A}s-grown textured zinc oxide films by ion beam treatment
                      and magnetron sputtering},
      journal      = {Thin solid films},
      volume       = {520},
      issn         = {0040-6090},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier},
      reportid     = {PreJuSER-22597},
      pages        = {4208 - 4213},
      year         = {2012},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {This work presents as-grown textured ZnO:Al films by rf
                      magnetron sputtering initiated by pre-treatment of glass
                      substrate with mixed argon and oxygen ions. A 650 nm thick
                      of this film exhibits surface texture features with lateral
                      size around 500 nm; the resistivity is below 5 x 10(-4)
                      Omega . cm and the transparency in the near-infrared
                      spectral range is high $(>80\%$ at 1000 nm).
                      Microcrystalline silicon thin film solar cells grown on the
                      textured glass exhibit excellent light trapping effect with
                      a short circuit current density of 18.2 mA/cm(2). (C) 2011
                      Elsevier B.V. All rights reserved.},
      keywords     = {J (WoSType)},
      cin          = {IEK-5 / ZCH},
      ddc          = {070},
      cid          = {I:(DE-Juel1)IEK-5-20101013 / I:(DE-Juel1)ZCH-20090406},
      pnm          = {Erneuerbare Energien},
      pid          = {G:(DE-Juel1)FUEK401},
      shelfmark    = {Materials Science, Multidisciplinary / Materials Science,
                      Coatings $\&$ Films / Physics, Applied / Physics, Condensed
                      Matter},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000302839900023},
      doi          = {10.1016/j.tsf.2011.04.098},
      url          = {https://juser.fz-juelich.de/record/22597},
}