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@ARTICLE{Mikulics:22689,
      author       = {Mikulics, M. and Hardtdegen, H. and Gregusová, D. and
                      Sofer, Z. and Simek, P. and Trellenkamp, St. and
                      Grützmacher, D. and Lüth, H. and Kordos, P. and Marso, M.},
      title        = {{N}on-uniform distribution of induced strain in a gate
                      recessed {A}l{G}a{N}/{G}a{N} structure evaluated by
                      micro-{PL} measurements},
      journal      = {Semiconductor science and technology},
      volume       = {27},
      issn         = {0268-1242},
      address      = {Bristol},
      publisher    = {IOP Publ.},
      reportid     = {PreJuSER-22689},
      pages        = {105008},
      year         = {2012},
      note         = {This work was supported by Ministry of Education of the
                      Czech Republic (research project no. MSM6046137302).
                      Financial support from specific university research (MSMT
                      no. 21/2012) is also acknowledged.},
      abstract     = {Micro-photoluminescence (mu-PL) studies were performed on
                      AlGaN/GaN heterostructure field effect transistors (HFETs)
                      with different gate-recessing depths. It was found that
                      mu-PL is the method of choice for detecting dry etching
                      damage and simultaneously recording strain and stress in the
                      HFET GaN layer. Lateral sub-mu m resolved mapping shows that
                      the strain in the GaN layer after recessing is partially
                      relaxed and non-uniform.},
      keywords     = {J (WoSType)},
      cin          = {JARA-FIT / PGI-9},
      ddc          = {530},
      cid          = {$I:(DE-82)080009_20140620$ / I:(DE-Juel1)PGI-9-20110106},
      pnm          = {Grundlagen für zukünftige Informationstechnologien},
      pid          = {G:(DE-Juel1)FUEK412},
      shelfmark    = {Engineering, Electrical $\&$ Electronic / Materials
                      Science, Multidisciplinary / Physics, Condensed Matter},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000309111800010},
      doi          = {10.1088/0268-1242/27/10/105008},
      url          = {https://juser.fz-juelich.de/record/22689},
}