%0 Conference Paper
%A Hardtdegen, Hilde
%A Mikulics, Martin
%T Towards Single Photon Lithography
%M FZJ-2015-05830
%D 2015
%X A novel mask-less lithography approach and its technological realization are presented for a simple, fast and flexible nanostructure mass-production. It is based on the use of single photon sources for exposure. A proof of principal is demonstrated using vertically integrated singularly addressable nano-LEDs assembled in arrays.
%B 41st International Conference on Micro- and Nano- Engineering
%C 21 Sep 2015 - 24 Sep 2015, The Hague (Netherlands)
Y2 21 Sep 2015 - 24 Sep 2015
M2 The Hague, Netherlands
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/255700