TY  - CONF
AU  - Hardtdegen, Hilde
AU  - Mikulics, Martin
TI  - Towards Single Photon Lithography
M1  - FZJ-2015-05830
PY  - 2015
AB  - A novel mask-less lithography approach and its technological realization are presented for a simple, fast and flexible nanostructure mass-production. It is based on the use of single photon sources for exposure. A proof of principal is demonstrated using vertically integrated singularly addressable nano-LEDs assembled in arrays.
T2  - 41st International Conference on Micro- and Nano- Engineering
CY  - 21 Sep 2015 - 24 Sep 2015, The Hague (Netherlands)
Y2  - 21 Sep 2015 - 24 Sep 2015
M2  - The Hague, Netherlands
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/255700
ER  -