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@ARTICLE{Schneller:25957,
author = {Schneller, T. and Waser, R.},
title = {{C}hemical solution deposition of ferroelectric thin films
- state-of-the-art and recent trends},
journal = {Ferroelectrics},
volume = {267},
issn = {0015-0193},
address = {London [u.a.]},
publisher = {Taylor $\&$ Francis},
reportid = {PreJuSER-25957},
pages = {293 - 301},
year = {2002},
note = {Record converted from VDB: 12.11.2012},
abstract = {Chemical deposition methods include a wide spectrum of
techniques ranging from chemical solution deposition (CSD)
to Metal-Organic Chemical Vapor Deposition (MOCVD). After
the short description of the complementary aspects, this
review will focus on CSD summarizing the state of the art of
the method for high-permittivity, ferroelectric, and other
complex electronic oxide thin films. Aspects of the
selection and the properties of the educts, the microscopic
mechanism of the film deposition, and the tailoring of the
microstructure by the deposition parameters will be
discussed, due to their significant influence on the final
film quality. To demonstrate the versatility and the
potential of the CSD method, recent hot topics like the
deposition of ultrathin films, lateral nanostructering, and
the formation of single grains will be specifically
discussed.},
keywords = {J (WoSType)},
cin = {IFF-EKM},
ddc = {530},
cid = {I:(DE-Juel1)VDB35},
pnm = {Materialien, Prozesse und Bauelemente für die Mikro- und
Nanoelektronik},
pid = {G:(DE-Juel1)FUEK252},
shelfmark = {Materials Science, Multidisciplinary / Physics, Condensed
Matter},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000176861100033},
doi = {10.1080/00150190210989},
url = {https://juser.fz-juelich.de/record/25957},
}