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@ARTICLE{Xie:283396,
author = {Xie, Jie and Harks, Peter-Paul R. M. L. and Li, Dongjiang
and Raijmakers, Lucas H. J. and Notten, Peter H. L.},
title = {{P}lanar and 3{D} deposition of {L}i4{T}i5{O}12 thin film
electrodes by {MOCVD}},
journal = {Solid state ionics},
volume = {287},
issn = {0167-2738},
address = {Amsterdam [u.a.]},
publisher = {Elsevier Science},
reportid = {FZJ-2016-01790},
pages = {83 - 88},
year = {2016},
abstract = {Li4Ti5O12 is well known to be a safe and efficient anode
material for Li-ion batteries. A metal–organic chemical
vapor deposition process has been developed for the
synthesis of Li4Ti5O12 thin film anodes on planar and 3D
substrates. The influences of various deposition parameters,
including precursor flow rates and post-annealing
temperatures, have been investigated by material and
electrochemical analyses. Li4Ti5O12 thin films deposited at
the optimized process parameters showed a high crystallinity
and high electrochemical activity. A reversible storage
capacity of 151 mAh/g was achieved at a current of 0.5 C,
corresponding to $86.3\%$ of the theoretical specific
capacity of Li4Ti5O12. Up to almost 600 cycles, the
electrodes showed no significant capacity loss. Furthermore,
the deposited thin film anodes also showed excellent rate
performance. Compared to the storage capacity at 0.5 C,
$93\%$ of the capacity was maintained at 10 C. Thin films
were also deposited on highly structured substrates to
investigate the uniformity and electrochemical performance.
With the same footprint area, the 3D Li4Ti5O12 film anode
showed a 2.5 times higher storage capacity than planar
electrode.},
cin = {IEK-9},
ddc = {530},
cid = {I:(DE-Juel1)IEK-9-20110218},
pnm = {131 - Electrochemical Storage (POF3-131)},
pid = {G:(DE-HGF)POF3-131},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000374199200013},
doi = {10.1016/j.ssi.2016.02.004},
url = {https://juser.fz-juelich.de/record/283396},
}