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000028931 084__ $$2WoS$$aBiochemical Research Methods
000028931 084__ $$2WoS$$aChemistry, Analytical
000028931 1001_ $$0P:(DE-Juel1)VDB2782$$aBreuer, U.$$b0$$uFZJ
000028931 245__ $$aXRF and SIMS/SNMS analyses of BaxSr1-xTiO3 dielectrics
000028931 260__ $$aBerlin$$bSpringer$$c2003
000028931 300__ $$a906 - 911
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000028931 440_0 $$08664$$aAnalytical and Bioanalytical Chemistry$$v375$$x1618-2642$$y7
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000028931 520__ $$aThe development of analytical tools and procedures for process control is a prerequisite for the integration of high permittivity and/or ferroelectric materials in CMOS devices. The thickness and composition of perovskite oxide films were determined by wavelength dispersive X-ray fluorescence analysis (XRF) with special emphasis on the ratio of the group-II elements to the Ti content, and a precision of 0.5% was achieved for a typical film thickness of 20-30 nm. Secondary ion mass spectrometry (SIMS) and sputtered neutrals mass spectrometry (SNMS) was used for depth profiling to determine film homogeneity and elemental interdiffusion at hetero-interfaces. Examples are given for Ba(x)Sr(1-x)TiO(3) and SrTiO(x) thin films which were grown in a prototype MOCVD production tool. No interdiffusion was observed for films grown at 600 degrees C on Pt electrodes in contrast to films grown directly on Si.
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000028931 65320 $$2Author$$aSIMS
000028931 65320 $$2Author$$aSNMS
000028931 65320 $$2Author$$aMOCVD
000028931 65320 $$2Author$$aBST
000028931 65320 $$2Author$$aDRAM
000028931 7001_ $$0P:(DE-Juel1)VDB15122$$aKrumpen, W.$$b1$$uFZJ
000028931 7001_ $$0P:(DE-Juel1)VDB3070$$aFitsilis, F.$$b2$$uFZJ
000028931 773__ $$0PERI:(DE-600)1459122-4$$a10.1007/s00216-003-1806-4$$gVol. 375, p. 906 - 911$$p906 - 911$$q375<906 - 911$$tAnalytical and bioanalytical chemistry$$v375$$x1618-2642$$y2003
000028931 8567_ $$uhttp://dx.doi.org/10.1007/s00216-003-1806-4
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000028931 9141_ $$y2003
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000028931 9201_ $$0I:(DE-Juel1)VDB35$$d31.12.2003$$gIFF$$kIFF-EKM$$lElektrokeramische Materialien$$x1
000028931 9201_ $$0I:(DE-Juel1)ZCH-20090406$$gZCH$$kZCH$$lZentralabteilung für Chemische Analysen$$x0
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