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@ARTICLE{Breuer:28931,
      author       = {Breuer, U. and Krumpen, W. and Fitsilis, F.},
      title        = {{XRF} and {SIMS}/{SNMS} analyses of {B}ax{S}r1-x{T}i{O}3
                      dielectrics},
      journal      = {Analytical and bioanalytical chemistry},
      volume       = {375},
      issn         = {1618-2642},
      address      = {Berlin},
      publisher    = {Springer},
      reportid     = {PreJuSER-28931},
      pages        = {906 - 911},
      year         = {2003},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {The development of analytical tools and procedures for
                      process control is a prerequisite for the integration of
                      high permittivity and/or ferroelectric materials in CMOS
                      devices. The thickness and composition of perovskite oxide
                      films were determined by wavelength dispersive X-ray
                      fluorescence analysis (XRF) with special emphasis on the
                      ratio of the group-II elements to the Ti content, and a
                      precision of $0.5\%$ was achieved for a typical film
                      thickness of 20-30 nm. Secondary ion mass spectrometry
                      (SIMS) and sputtered neutrals mass spectrometry (SNMS) was
                      used for depth profiling to determine film homogeneity and
                      elemental interdiffusion at hetero-interfaces. Examples are
                      given for Ba(x)Sr(1-x)TiO(3) and SrTiO(x) thin films which
                      were grown in a prototype MOCVD production tool. No
                      interdiffusion was observed for films grown at 600 degrees C
                      on Pt electrodes in contrast to films grown directly on Si.},
      keywords     = {J (WoSType)},
      cin          = {IFF-EKM / ZCH},
      ddc          = {540},
      cid          = {I:(DE-Juel1)VDB35 / I:(DE-Juel1)ZCH-20090406},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Biochemical Research Methods / Chemistry, Analytical},
      typ          = {PUB:(DE-HGF)16},
      pubmed       = {pmid:12707759},
      UT           = {WOS:000182702300012},
      doi          = {10.1007/s00216-003-1806-4},
      url          = {https://juser.fz-juelich.de/record/28931},
}