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| 001 | 28931 | ||
| 005 | 20180210133941.0 | ||
| 024 | 7 | _ | |2 pmid |a pmid:12707759 |
| 024 | 7 | _ | |2 DOI |a 10.1007/s00216-003-1806-4 |
| 024 | 7 | _ | |2 WOS |a WOS:000182702300012 |
| 037 | _ | _ | |a PreJuSER-28931 |
| 041 | _ | _ | |a eng |
| 082 | _ | _ | |a 540 |
| 084 | _ | _ | |2 WoS |a Biochemical Research Methods |
| 084 | _ | _ | |2 WoS |a Chemistry, Analytical |
| 100 | 1 | _ | |a Breuer, U. |b 0 |u FZJ |0 P:(DE-Juel1)VDB2782 |
| 245 | _ | _ | |a XRF and SIMS/SNMS analyses of BaxSr1-xTiO3 dielectrics |
| 260 | _ | _ | |a Berlin |b Springer |c 2003 |
| 300 | _ | _ | |a 906 - 911 |
| 336 | 7 | _ | |a Journal Article |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a article |2 DRIVER |
| 440 | _ | 0 | |a Analytical and Bioanalytical Chemistry |x 1618-2642 |0 8664 |y 7 |v 375 |
| 500 | _ | _ | |a Record converted from VDB: 12.11.2012 |
| 520 | _ | _ | |a The development of analytical tools and procedures for process control is a prerequisite for the integration of high permittivity and/or ferroelectric materials in CMOS devices. The thickness and composition of perovskite oxide films were determined by wavelength dispersive X-ray fluorescence analysis (XRF) with special emphasis on the ratio of the group-II elements to the Ti content, and a precision of 0.5% was achieved for a typical film thickness of 20-30 nm. Secondary ion mass spectrometry (SIMS) and sputtered neutrals mass spectrometry (SNMS) was used for depth profiling to determine film homogeneity and elemental interdiffusion at hetero-interfaces. Examples are given for Ba(x)Sr(1-x)TiO(3) and SrTiO(x) thin films which were grown in a prototype MOCVD production tool. No interdiffusion was observed for films grown at 600 degrees C on Pt electrodes in contrast to films grown directly on Si. |
| 536 | _ | _ | |a Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |c I01 |2 G:(DE-HGF) |0 G:(DE-Juel1)FUEK252 |x 0 |
| 588 | _ | _ | |a Dataset connected to Web of Science, Pubmed |
| 650 | _ | 7 | |a J |2 WoSType |
| 653 | 2 | 0 | |2 Author |a XRF |
| 653 | 2 | 0 | |2 Author |a SIMS |
| 653 | 2 | 0 | |2 Author |a SNMS |
| 653 | 2 | 0 | |2 Author |a MOCVD |
| 653 | 2 | 0 | |2 Author |a BST |
| 653 | 2 | 0 | |2 Author |a DRAM |
| 700 | 1 | _ | |a Krumpen, W. |b 1 |u FZJ |0 P:(DE-Juel1)VDB15122 |
| 700 | 1 | _ | |a Fitsilis, F. |b 2 |u FZJ |0 P:(DE-Juel1)VDB3070 |
| 773 | _ | _ | |a 10.1007/s00216-003-1806-4 |g Vol. 375, p. 906 - 911 |p 906 - 911 |q 375<906 - 911 |0 PERI:(DE-600)1459122-4 |t Analytical and bioanalytical chemistry |v 375 |y 2003 |x 1618-2642 |
| 856 | 7 | _ | |u http://dx.doi.org/10.1007/s00216-003-1806-4 |
| 909 | C | O | |o oai:juser.fz-juelich.de:28931 |p VDB |
| 913 | 1 | _ | |k I01 |v Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik |l Informationstechnologie mit nanoelektronischen Systemen |b Information |0 G:(DE-Juel1)FUEK252 |x 0 |
| 914 | 1 | _ | |y 2003 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0010 |a JCR/ISI refereed |
| 920 | 1 | _ | |k IFF-EKM |l Elektrokeramische Materialien |d 31.12.2003 |g IFF |0 I:(DE-Juel1)VDB35 |x 1 |
| 920 | 1 | _ | |k ZCH |l Zentralabteilung für Chemische Analysen |g ZCH |0 I:(DE-Juel1)ZCH-20090406 |x 0 |
| 970 | _ | _ | |a VDB:(DE-Juel1)24105 |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a ConvertedRecord |
| 980 | _ | _ | |a journal |
| 980 | _ | _ | |a I:(DE-Juel1)PGI-7-20110106 |
| 980 | _ | _ | |a I:(DE-Juel1)ZEA-3-20090406 |
| 980 | _ | _ | |a UNRESTRICTED |
| 981 | _ | _ | |a I:(DE-Juel1)PGI-7-20110106 |
| 981 | _ | _ | |a I:(DE-Juel1)ZEA-3-20090406 |
| 981 | _ | _ | |a I:(DE-Juel1)ZCH-20090406 |
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