%0 Journal Article
%A Rodriguez Contreras, J.
%A Kohlstedt, H.
%A Poppe, U.
%A Waser, R.
%A Buchal, Ch.
%T Surface treatment effects on the thickness dependence of the remanent polarization of PbZr0.52Ti0.48O3 capacitors
%J Applied physics letters
%V 83
%@ 0003-6951
%C Melville, NY
%I American Institute of Physics
%M PreJuSER-32035
%P 126
%D 2003
%Z Record converted from VDB: 12.11.2012
%X In this letter, we report on the thickness dependence of the remanent polarization of Pt/PbZr0.52Ti0.48O3/SrRuO3 capacitors. Two different patterning techniques were used to fabricate the capacitors. For lift-off processed capacitors, the remanent polarization decreased with decreasing thickness. Ion-beam-etched capacitors, however, showed a constant remanent polarization for all PbZr0.52Ti0.48O3 film thicknesses down to 23 nm. Remarkably, this constant remanent polarization for ion-beam-etched capacitors corresponds to the spontaneous polarization expected for a stress-free bulk PbZr0.52Ti0.48O3 crystal. (C) 2003 American Institute of Physics.
%K J (WoSType)
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000183877800043
%R 10.1063/1.1590431
%U https://juser.fz-juelich.de/record/32035