Journal Article

PreJuSER-32035

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Surface treatment effects on the thickness dependence of the remanent polarization of PbZr0.52Ti0.48O3 capacitors

Rodriguez Contreras, J.FZJ* ; Kohlstedt, H.FZJ* ; Poppe, U.FZJ* ; Waser, R.FZJ* ; Buchal, C.FZJ*

2003
American Institute of Physics Melville, NY

This record in other databases:    

Please use a persistent id in citations: http://hdl.handle.net/2128/1240  doi:10.1063/1.1590431

Abstract: In this letter, we report on the thickness dependence of the remanent polarization of Pt/PbZr0.52Ti0.48O3/SrRuO3 capacitors. Two different patterning techniques were used to fabricate the capacitors. For lift-off processed capacitors, the remanent polarization decreased with decreasing thickness. Ion-beam-etched capacitors, however, showed a constant remanent polarization for all PbZr0.52Ti0.48O3 film thicknesses down to 23 nm. Remarkably, this constant remanent polarization for ion-beam-etched capacitors corresponds to the spontaneous polarization expected for a stress-free bulk PbZr0.52Ti0.48O3 crystal. (C) 2003 American Institute of Physics.

Keyword(s): J

Note: Record converted from VDB: 12.11.2012

---

Contributing Institute(s):

1. Elektrokeramische Materialien (IFF-EKM)
2. Institut für Halbleiterschichten und Bauelemente (ISG-1)
3. Mikrostrukturforschung (IFF-IMF)

Research Program(s):

1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)
2. Kondensierte Materie (M02)

Appears in the scientific report 2003
Notes: This version is available at the following Publisher URL: http://apl.aip.org

---

Database coverage:

---