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@ARTICLE{RodriguezContreras:32035,
      author       = {Rodriguez Contreras, J. and Kohlstedt, H. and Poppe, U. and
                      Waser, R. and Buchal, Ch.},
      title        = {{S}urface treatment effects on the thickness dependence of
                      the remanent polarization of {P}b{Z}r0.52{T}i0.48{O}3
                      capacitors},
      journal      = {Applied physics letters},
      volume       = {83},
      issn         = {0003-6951},
      address      = {Melville, NY},
      publisher    = {American Institute of Physics},
      reportid     = {PreJuSER-32035},
      pages        = {126},
      year         = {2003},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {In this letter, we report on the thickness dependence of
                      the remanent polarization of Pt/PbZr0.52Ti0.48O3/SrRuO3
                      capacitors. Two different patterning techniques were used to
                      fabricate the capacitors. For lift-off processed capacitors,
                      the remanent polarization decreased with decreasing
                      thickness. Ion-beam-etched capacitors, however, showed a
                      constant remanent polarization for all PbZr0.52Ti0.48O3 film
                      thicknesses down to 23 nm. Remarkably, this constant
                      remanent polarization for ion-beam-etched capacitors
                      corresponds to the spontaneous polarization expected for a
                      stress-free bulk PbZr0.52Ti0.48O3 crystal. (C) 2003 American
                      Institute of Physics.},
      keywords     = {J (WoSType)},
      cin          = {IFF-EKM / ISG-1 / IFF-IMF},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB35 / I:(DE-Juel1)VDB41 / I:(DE-Juel1)VDB37},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik / Kondensierte Materie},
      pid          = {G:(DE-Juel1)FUEK252 / G:(DE-Juel1)FUEK242},
      shelfmark    = {Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000183877800043},
      doi          = {10.1063/1.1590431},
      url          = {https://juser.fz-juelich.de/record/32035},
}