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@ARTICLE{Schroeder:32047,
      author       = {Schroeder, H. and Schmitz, S.},
      title        = {{T}he thickness dependence of leakage current in thin
                      films},
      journal      = {Applied physics letters},
      volume       = {83},
      issn         = {0003-6951},
      address      = {Melville, NY},
      publisher    = {American Institute of Physics},
      reportid     = {PreJuSER-32047},
      pages        = {4381},
      year         = {2003},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {The leakage current through high-permittivity perovskite
                      thin films in the nanometer range is of great technological
                      interest because of the possible applications of these
                      insulating films in future submicroelectronic devices such
                      as dielectrics in Gbit dynamic random access memories or
                      gate oxides in metal-oxide-semiconductor field-effect
                      transistors. The experimental result of decreasing leakage
                      current with decreasing thickness of the dielectric for the
                      same externally applied field can be described by using a
                      model combining thermionic emission at the
                      electrode/dielectric interface and a low-mobility,
                      high-permittivity dielectric with low-permittivity layers at
                      the interfaces, the so-called dead layers. (C) 2003 American
                      Institute of Physics.},
      keywords     = {J (WoSType)},
      cin          = {IFF-EKM},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB35},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Physics, Applied},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000186662000035},
      doi          = {10.1063/1.1629141},
      url          = {https://juser.fz-juelich.de/record/32047},
}