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@ARTICLE{Schelling:35289,
      author       = {Schelling, C. and Myslivecek, J. and Mühlberger, M. and
                      Lichtenberger, H. and Zhong, Z. and Voigtländer, B. and
                      Bauer, G. and Schäffler, F.},
      title        = {{K}inetic and strain-driven growth phenomena on {S}i(001)},
      journal      = {Physica status solidi / A},
      volume       = {201},
      issn         = {0031-8965},
      address      = {Weinheim},
      publisher    = {Wiley-VCH},
      reportid     = {PreJuSER-35289},
      pages        = {324 - 328},
      year         = {2004},
      note         = {Record converted from VDB: 12.11.2012},
      abstract     = {Self-organization phenomena in semiconductors are usually
                      based on strain-driven island growth during hetero epitaxial
                      layer deposition. However, kinetic phenomena can become
                      important and even dominating at the low growth temperatures
                      usually employed during molecular beam epitaxy. We report on
                      kinetic step bunching on Si(001), and identify the driving
                      mechanism on the atomic scale via kinetic Monte Carlo
                      simulations. Another phenomena discussed is facet formation
                      during annealing of SiO2-covered Si(001) nanostructures at
                      the relatively low temperatures usually employed for oxide
                      desorption. Both phenomena are combined to facilitate
                      perfect ordering of self-assembled Ge dots on facetted
                      Si(001) nanostructure templates. (C) 2004 WILEY-VCH Verlag
                      GmbH $\&$ Co. KGaA, Weinheim.},
      keywords     = {J (WoSType)},
      cin          = {ISG-3},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB43},
      pnm          = {Materialien, Prozesse und Bauelemente für die Mikro- und
                      Nanoelektronik},
      pid          = {G:(DE-Juel1)FUEK252},
      shelfmark    = {Materials Science, Multidisciplinary / Physics, Applied /
                      Physics, Condensed Matter},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000188794900025},
      doi          = {10.1002/pssa.200303966},
      url          = {https://juser.fz-juelich.de/record/35289},
}