Talk (non conference)

PreJuSER-37163

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Influence of dry etching using argon on structural and electrical properties of crystalline and non-crystalline SrBi2Ta2O9

Hartner, W. ; Schindler, G. ; Weinreich, V. ; Ahlstedt, M. ; Schroeder, H. ; Waser, R.FZJ* ; Dehm, C. ; Mazure, I. A.

1999

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Institut für Festkörperforschung (IFF)

Research Program(s):

1. Festkörperforschung für die Informationstechnik (23.42.0)

Appears in the scientific report 1999

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