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@ARTICLE{Vasco:39692,
author = {Vasco, E. and Dittmann, R. and Karthäuser, S. and Waser,
R.},
title = {{F}abrication of stress-induced {S}r{R}u{O}3 nanostructures
by pulsed laser deposition},
journal = {Applied physics / A},
volume = {79},
issn = {0947-8396},
address = {Berlin},
publisher = {Springer},
reportid = {PreJuSER-39692},
pages = {1461},
year = {2004},
note = {Record converted from VDB: 12.11.2012},
abstract = {The compressive stress originated in the coherent
epitaxial-SrRuO3/LaAlO3 interface has been used as a
nano-patterning tool for the creation of island and wire
arrays in ultrathin (<20 nm) SrRuO3 films. The
nanostructure, stoichiometry, and electrical properties of
these arrays have been studied by X-ray diffraction, atomic
force microscopy, Rutherford back-scattering spectroscopy
and resistivity vs temperature measurements. The influence
of the shadowing effect produced by the non-perpendicular
incidence of the evaporated particles on the array
morphology is discussed.},
keywords = {J (WoSType)},
cin = {IFF-IEM / CNI},
ddc = {530},
cid = {I:(DE-Juel1)VDB321 / I:(DE-Juel1)VDB381},
pnm = {Materialien, Prozesse und Bauelemente für die Mikro- und
Nanoelektronik},
pid = {G:(DE-Juel1)FUEK252},
shelfmark = {Materials Science, Multidisciplinary / Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000222766100174},
doi = {10.1007/s00339-004-2811-y},
url = {https://juser.fz-juelich.de/record/39692},
}