Journal Article

PreJuSER-39692

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Fabrication of stress-induced SrRuO3 nanostructures by pulsed laser deposition

Vasco, E.FZJ* ; Dittmann, R.FZJ* ; Karthäuser, S.FZJ* ; Waser, R.FZJ*

2004
Springer Berlin

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Please use a persistent id in citations: doi:10.1007/s00339-004-2811-y

Abstract: The compressive stress originated in the coherent epitaxial-SrRuO3/LaAlO3 interface has been used as a nano-patterning tool for the creation of island and wire arrays in ultrathin (<20 nm) SrRuO3 films. The nanostructure, stoichiometry, and electrical properties of these arrays have been studied by X-ray diffraction, atomic force microscopy, Rutherford back-scattering spectroscopy and resistivity vs temperature measurements. The influence of the shadowing effect produced by the non-perpendicular incidence of the evaporated particles on the array morphology is discussed.

Keyword(s): J

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Elektronische Materialien (IFF-IEM)
2. Center of Nanoelectronic Systems for Information Technology (CNI)

Research Program(s):

1. Materialien, Prozesse und Bauelemente für die Mikro- und Nanoelektronik (I01)

Appears in the scientific report 2004

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Database coverage:
JCR ; Science Citation Index Expanded ; Thomson Reuters Master Journal List ; Web of Science Core Collection

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