%0 Journal Article
%A Holländer, B.
%A Lenk, S.
%A Mantl, S.
%A Trinkaus, H.
%A Kirch, D.
%A Luysberg, M.
%A Hackbarth, T.
%A Herzog, H.-J.
%A Fichtner, P. F. P.
%T Strain relaxation of pseudomorphic Si(1-X)GeX/Si(100) heterostructures after hydrogen or helium ion implantation for virtual substrate fabrication
%J Nuclear instruments & methods in physics research / B
%V 175/177
%@ 0168-583X
%C Amsterdam [u.a.]
%I Elsevier
%M PreJuSER-40012
%P 357 - 367
%D 2001
%Z Record converted from VDB: 12.11.2012
%F PUB:(DE-HGF)16
%9 Journal Article
%U https://juser.fz-juelich.de/record/40012