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@ARTICLE{Hollnder:40012,
      author       = {Holländer, B. and Lenk, S. and Mantl, S. and Trinkaus, H.
                      and Kirch, D. and Luysberg, M. and Hackbarth, T. and Herzog,
                      H.-J. and Fichtner, P. F. P.},
      title        = {{S}train relaxation of pseudomorphic
                      {S}i(1-{X}){G}e{X}/{S}i(100) heterostructures after hydrogen
                      or helium ion implantation for virtual substrate
                      fabrication},
      journal      = {Nuclear instruments $\&$ methods in physics research / B},
      volume       = {175/177},
      issn         = {0168-583X},
      address      = {Amsterdam [u.a.]},
      publisher    = {Elsevier},
      reportid     = {PreJuSER-40012},
      pages        = {357 - 367},
      year         = {2001},
      note         = {Record converted from VDB: 12.11.2012},
      cin          = {ISG-1 / IFF-TH-III / IFF-IMF / IFF-EKM / IME},
      ddc          = {530},
      cid          = {I:(DE-Juel1)VDB41 / I:(DE-Juel1)VDB32 / I:(DE-Juel1)VDB37 /
                      I:(DE-Juel1)VDB35 / I:(DE-Juel1)VDB54},
      pnm          = {Ionentechnik / Festkörperforschung für die
                      Informationstechnik},
      pid          = {G:(DE-Juel1)FUEK67 / G:(DE-Juel1)FUEK54},
      typ          = {PUB:(DE-HGF)16},
      url          = {https://juser.fz-juelich.de/record/40012},
}