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100 1 _ |a Holländer, B.
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245 _ _ |a Strain relaxation of pseudomorphic Si(1-X)GeX/Si(100) heterostructures after hydrogen or helium ion implantation for virtual substrate fabrication
260 _ _ |a Amsterdam [u.a.]
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300 _ _ |a 357 - 367
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440 _ 0 |a Nuclear Instruments and Methods in Physics Research Section B
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700 1 _ |a Lenk, S.
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700 1 _ |a Mantl, S.
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700 1 _ |a Trinkaus, H.
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700 1 _ |a Kirch, D.
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700 1 _ |a Luysberg, M.
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700 1 _ |a Hackbarth, T.
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700 1 _ |a Herzog, H.-J.
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700 1 _ |a Fichtner, P. F. P.
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773 _ _ |g Vol. 175/177, p. 357 - 367
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