%0 Journal Article
%A Skriniarova, J.
%A Bochem, P.
%A Fox, P. T.
%A Kordos, P.
%T Photoenhanced wet etching of gallium nitride in KOH-based solution
%J Journal of vacuum science & technology / B
%V 19
%@ 0734-211X
%C New York, NY
%I Inst.
%M PreJuSER-40397
%P 1721
%D 2001
%Z Record converted from VDB: 12.11.2012
%F PUB:(DE-HGF)16
%9 Journal Article
%U https://juser.fz-juelich.de/record/40397