TY  - JOUR
AU  - Skriniarova, J.
AU  - Bochem, P.
AU  - Fox, P. T.
AU  - Kordos, P.
TI  - Photoenhanced wet etching of gallium nitride in KOH-based solution
JO  - Journal of vacuum science & technology / B
VL  - 19
SN  - 0734-211X
CY  - New York, NY
PB  - Inst.
M1  - PreJuSER-40397
SP  - 1721
PY  - 2001
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)16
UR  - https://juser.fz-juelich.de/record/40397
ER  -