% IMPORTANT: The following is UTF-8 encoded. This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.
@ARTICLE{Skriniarova:40397,
author = {Skriniarova, J. and Bochem, P. and Fox, P. T. and Kordos,
P.},
title = {{P}hotoenhanced wet etching of gallium nitride in
{KOH}-based solution},
journal = {Journal of vacuum science $\&$ technology / B},
volume = {19},
issn = {0734-211X},
address = {New York, NY},
publisher = {Inst.},
reportid = {PreJuSER-40397},
pages = {1721},
year = {2001},
note = {Record converted from VDB: 12.11.2012},
cin = {ISG-1 / ISG-2},
ddc = {530},
cid = {I:(DE-Juel1)VDB41 / I:(DE-Juel1)VDB42},
pnm = {Halbleiterbauelemente und Analytik / Ionen- und
Lithographietechnik},
pid = {G:(DE-Juel1)FUEK68 / G:(DE-Juel1)FUEK66},
typ = {PUB:(DE-HGF)16},
url = {https://juser.fz-juelich.de/record/40397},
}