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| 001 | 40397 | ||
| 005 | 20180210125942.0 | ||
| 024 | 7 | _ | |a 0734-211X |2 ISSN |
| 037 | _ | _ | |a PreJuSER-40397 |
| 082 | _ | _ | |a 530 |
| 100 | 1 | _ | |a Skriniarova, J. |0 P:(DE-Juel1)VDB5765 |b 0 |u FZJ |
| 245 | _ | _ | |a Photoenhanced wet etching of gallium nitride in KOH-based solution |
| 260 | _ | _ | |a New York, NY |b Inst. |c 2001 |
| 300 | _ | _ | |a 1721 |
| 336 | 7 | _ | |a Journal Article |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |
| 336 | 7 | _ | |a Output Types/Journal article |2 DataCite |
| 336 | 7 | _ | |a Journal Article |0 0 |2 EndNote |
| 336 | 7 | _ | |a ARTICLE |2 BibTeX |
| 336 | 7 | _ | |a JOURNAL_ARTICLE |2 ORCID |
| 336 | 7 | _ | |a article |2 DRIVER |
| 440 | _ | 0 | |a Journal of Vacuum Science and Technology B |x 0734-211X |0 3988 |v 19 |
| 500 | _ | _ | |a Record converted from VDB: 12.11.2012 |
| 536 | _ | _ | |a Halbleiterbauelemente und Analytik |c 29.88.0 |2 G:(DE-HGF) |0 G:(DE-Juel1)FUEK68 |x 0 |
| 536 | _ | _ | |a Ionen- und Lithographietechnik |c 29.86.0 |0 G:(DE-Juel1)FUEK66 |x 1 |
| 700 | 1 | _ | |a Bochem, P. |0 P:(DE-Juel1)VDB5806 |b 1 |u FZJ |
| 700 | 1 | _ | |a Fox, P. T. |0 P:(DE-Juel1)VDB5525 |b 2 |u FZJ |
| 700 | 1 | _ | |a Kordos, P. |0 P:(DE-Juel1)VDB5426 |b 3 |u FZJ |
| 773 | _ | _ | |g Vol. 19, p. 1721 |p 1721 |q 19<1721 |0 PERI:(DE-600)1475429-0 |t Journal of vacuum science & technology / B |v 19 |y 2001 |x 0734-211X |
| 909 | C | O | |o oai:juser.fz-juelich.de:40397 |p VDB |
| 913 | 1 | _ | |k 29.88.0 |v Halbleiterbauelemente und Analytik |l Grundlagenforschung zur Informationstechnik |b Informationstechnik |0 G:(DE-Juel1)FUEK68 |x 0 |
| 913 | 1 | _ | |k 29.86.0 |v Ionen- und Lithographietechnik |l Grundlagenforschung zur Informationstechnik |b Informationstechnik |0 G:(DE-Juel1)FUEK66 |x 1 |
| 914 | 1 | _ | |y 2001 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0010 |a JCR/ISI refereed |
| 920 | 1 | _ | |k ISG-1 |l Institut für Halbleiterschichten und Bauelemente |d 31.12.2006 |g ISG |0 I:(DE-Juel1)VDB41 |x 0 |
| 920 | 1 | _ | |k ISG-2 |l Institut für Bio- und Chemosensoren |d 31.12.2006 |g ISG |0 I:(DE-Juel1)VDB42 |x 1 |
| 970 | _ | _ | |a VDB:(DE-Juel1)5409 |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a ConvertedRecord |
| 980 | _ | _ | |a journal |
| 980 | _ | _ | |a I:(DE-Juel1)PGI-9-20110106 |
| 980 | _ | _ | |a I:(DE-Juel1)IBN-2-20090406 |
| 980 | _ | _ | |a UNRESTRICTED |
| 981 | _ | _ | |a I:(DE-Juel1)PGI-9-20110106 |
| 981 | _ | _ | |a I:(DE-Juel1)IBN-2-20090406 |
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