%0 Conference Paper
%A Holländer, B.
%A Lenk, S.
%A Mantl, S.
%A Trinkaus, H.
%A Kirch, D.
%A Luysberg, M.
%A Herzog, H.-J.
%A Hackbarth, T.
%A Fichtner, P. F. P.
%T Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si(1-x)Gex films on silicon
%M PreJuSER-40615
%@ 0-7803-6462-7
%D 2001
%Z Record converted from VDB: 12.11.2012
%< Proceedings of 2000 International Conference on Ion Implantation Technology. - 2001. - 0-7803-6462-7. - S. 326
%F PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
%9 Contribution to a conference proceedingsContribution to a book
%U https://juser.fz-juelich.de/record/40615