Contribution to a conference proceedings/Contribution to a book

PreJuSER-40615

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si(1-x)Gex films on silicon

Holländer, B.FZJ* ; Lenk, S.FZJ* ; Mantl, S.FZJ* ; Trinkaus, H.FZJ* ; Kirch, D.FZJ* ; Luysberg, M.FZJ* ; Herzog, H.-J. ; Hackbarth, T. ; Fichtner, P. F. P.

2001

ISBN: 0-7803-6462-7

This record in other databases:

Note: Record converted from VDB: 12.11.2012

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Contributing Institute(s):

1. Institut für Halbleiterschichten und Bauelemente (ISG-1)
2. Theorie III (IFF-TH-III)
3. Mikrostrukturforschung (IFF-IMF)
4. Institut für Medizin (IME)

Research Program(s):

1. Ionentechnik (29.87.0)

Appears in the scientific report 2001
Notes: Proceedings

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