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000040615 245__ $$aSubstrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si(1-x)Gex films on silicon
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000040615 29510 $$aProceedings of 2000 International Conference on Ion Implantation Technology. - 2001. - 0-7803-6462-7. - S. 326
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