TY  - CONF
AU  - Holländer, B.
AU  - Lenk, S.
AU  - Mantl, S.
AU  - Trinkaus, H.
AU  - Kirch, D.
AU  - Luysberg, M.
AU  - Herzog, H.-J.
AU  - Hackbarth, T.
AU  - Fichtner, P. F. P.
TI  - Substrate engineering by hydrogen or helium implantation for epitaxial growth of lattice mismatched Si(1-x)Gex films on silicon
M1  - PreJuSER-40615
SN  - 0-7803-6462-7
PY  - 2001
N1  - Record converted from VDB: 12.11.2012
LB  - PUB:(DE-HGF)8 ; PUB:(DE-HGF)7
UR  - https://juser.fz-juelich.de/record/40615
ER  -